中文摘要：

针对处于点啮合状态下物体间啮合力的检测问题，提出薄膜单点力传感器。根据物体间啮合力较大的实际检测状况，利用碳二硫化钼压敏电阻油墨的轴向实心柱式压阻效应实现对点啮合物体间啮合力的检测。在研究现有成熟的丝网印制工艺基础上，通过丝网印制技术制作了薄膜单点力传感器，其厚度为0．15mm。试验测试与分析可知，薄膜单点力传感器能够检测出点啮合物体间的啮合力；并且该传感器具有良好的性能，如灵敏度为962．5Ω／N，分辨率为0．002N。

英文摘要：

Aim at meshing force detection between single-point meshing objects, thin film single-point force sensor is brought forward. According to the actual condition of larger force between single-point meshing objects, axially piezoresistive effect of carbon molybdenum disulfide piezoresistive ink is utilized to realize the detection of the mutual force. On the basis of researching the mature technologies of silk-screen printing, a thin film single-point force sensor of 0.15 mm thick is made by using silk-screen printing technologies. Test and analysis show that the thin film single-point force sensor can detect the meshing force between single-point meshing objects, and it has good performance such as a sensitivity of 962.5 Ω/N and a resolution of 0.002 N.