归纳和总结了制备应用于气敏传感器的纳米多孔WO3薄膜的关键技术,论述了降低材料工作温度和提高灵敏度的多种途径.分析了其各自的利弊,重点介绍了溶胶-凝胶法制备的原理和方法,总结了其应用于制备传感器材料时所面临的问题,并展望了该方向的研究前景。
The nanoporous WOa thin film is a kind of important material. From the point of preparing WO3 thin films, the pros and cons of their respective methods are discussed, the sol-gel method and the principle of the method are focused on, and improvement measures based on the inadequacies of the law are proposed.