中文摘要：

为了有效改善基于无机材料的可变光衰减器（VOA）功耗大以及全聚合物VOA响应速度慢的问题,设计并研制了一种基于有机聚合物/无机SiO2材料的马赫曾德尔干涉仪（MZI）型VOA器件。根据脊型波导结构的单模传输条件,设计并优化了单模波导的截面尺寸,同时对器件结构进行了模拟,采用光刻和显影等工艺制备出功耗较低、响应速度快的VOA器件。在1550nm通信波长下,器件的衰减范围为23dB,最大功耗仅为14mW,器件的上升时间为252μs,下降时间为384μs。实验结果表明,采用有机/无机混合波导结构,并通过对器件结构参数的优化,可以实现功耗低且响应快速的VOA器件。

英文摘要：

A kind of polymer/SiO2 hybrid Mach-Zehnder interferometer （MZI） variable optical attenuator （VOA） is designed and fabricated. The VOA has lower power consumption than the VOA based on inorganic materials and faster response than the polymer VOA. The cross section size of the single mode waveguide is designed and optimized according to the single mode transmission conditions of ridge waveguide, and the structure of device is also simulated. The VOA with low power consumption and fast response is obtained by using the photolithography and wet-etching fabrication processes. With 1550 nm optical communication wavelength, the dynamic attenuation range of the fabricated VOA is 23 dB and the maximum power consumption is 14 mW. The rise and fall times of the device are 252 μs and 384 μs. The experimental results show that the VOA has a lower power consumption and a faster response with using the organic/inorganic hybrid structure and optimizing the device structure.