中文摘要：

由于无驱动结构硅微机械陀螺的特殊性，其输出信号受自转频率的影响很大，为非线性的，这种动态特性使陀螺无法实用化，因此提出了一种适合该陀螺信号非线性补偿的新算法，通过补偿理论分析，软件程序编写和调试，硬件电路的构建，实际测试的陀螺仪输出信号和补偿后陀螺仪输出信号的对比，论证了该非线性补偿算法的可行性，并且由实际数据验证了该算法的补偿误差较小，精确性很高。证实该算法可以消除由载体自转引起的陀螺信号的误差，最终使陀螺仪输出信号的幅值只与输入角速度之间呈线性关系，稳定性得到增强。从而完善了硅微机械陀螺信号处理系统，使陀螺实用化。

英文摘要：

Because of the particularity of non-drive structure gyroscope, its output signal is influ- enced greatly by spin frequency and presents as non-linearity. As it is not very practical, a kind of non- linearity compensation technology algorithms for this type of gyroscope is proposed. Based on the analysis of compensation theory, the programming and the debugging of software, the designing of hardware circuit and the contrast of actual gyro output signal and compensated output signal, the feasibility of non- linearity compensation algorithm is proven. Compensation errors based on this algorithm are proven to be tiny and the accuracy is proven to be very high by the testing and computational data. This algorithm is confirmed to eliminate the gyroscope signal error which is caused by the carrier rotation. Finally, the peak values of the gyroscope output signal is made to only represent the linear relation with the yaw and pitch velocity so that the stability is enhanced. Thus the silicon micromachined gyroscope signal process- ing system is consummated to make gyroscope utilizable.