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中文摘要：
论述了气体摆的机理，分析了密闭腔中自然对流气体的浮升力及浮升力与温度变化的关系式。该文给出了二维微机械气体摆式加速度计与倾角传感器的结构原理和信号处理电路，并通过对实际制作的两维微机械气体摆式加速度计和倾角传感器样机进行测试。结果表明，在±7g和±25°时，两维微机械加速度计和微机械倾角传感器的非线性度均小于1％FS。
英文摘要：
The theory of gas pendulum is introduced. The buoyancy lift of natural convection gas is analyzed in a hermetic chamber, and the formula between the buoyancy lift and the change of temperature is given. The mircomachined gas pendulum accelerometer and the structure and signal processing circuit of the tilt sensor are also introduced. The test shows that when the acceleration＇s measurement range is ±7 g and the tilt of the tilt sensor sensor＇s measurement range is ± 25°, the non-linearity is less than 1 %FS.
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