中文摘要：

为解决微定位平台大行程与高精度之间的矛盾，提出一种新型的3自由度柔性并联机构。该机构三条支链采用特殊方式与动平台相连，使整体机构结构紧凑且具有良好的力学传递性能。同时，机构采用行程大，分辨率高，便于控制的电磁驱动器作为驱动部件，保证机构在不需要引入放大机构的前提下便可获得较大的行程和较高的分辨率。使用大行程柔性铰链代替普通的球铰，降低了加工制造难度和机构刚度模型的求解难度。采用螺旋理论分析了3-P（4S）并联机构末端运动特征，结合单元刚度矩阵法和矩阵位移法推导了3-P（4S）柔性并联机构的静刚度模型，并采用ANSYS进行了分析验证。

英文摘要：

In order to solve the conflict between large stroke and high precision of micro positioning platform, a novel 3-DOF complaint parallel mechanism is proposed. The three chains connect to the platform with a special way, which makes the mechanism behave a compact structure and good mechanical properties. At the same time, the mechanism uses electromagnetic actuators that are characterized by large stroke, high precision and easy to control as the driving component, which guarantees the requirement of large stroke and high resolution of the mechanism without a need for amplifier mechanisms, Wide-range flexure hinges are used to replace the common spherical joints, which will reduce the difficulty of processing and manufacturing of the complaint mechanism, as well as the stiffness modeling. The kinematic characteristics of the proposed 3-P（4S） parallel mechanism is analyzed by using the screw theory. Combined with unit stiffness matrix method and matrix displacement method, the static stiffness model of the mechanism is obtained. ANSYS analysis is made to verify the accuracy of the stiffness model.