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Optimal Design, Fabrication and Control of an XY Micro-positioning Stage Driven by Electromagnetic A
  • ISSN号：0278-0046
  • 期刊名称：IEEE Transactions on Industrial Electronics
  • 时间：2013.10.10
  • 页码：4613-4626
  • 相关项目：应用于空间晶体生长科学实验装置的并联主动减振机构及控制方法研究
作者： Xiao Shunli|Li Yangmin|
同期刊论文项目
应用于空间晶体生长科学实验装置的并联主动减振机构及控制方法研究
期刊论文 23 会议论文 23
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