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中文摘要：
设计了一种MEMS器件三维结构生成的方法，介绍了结合工艺流程实现转换的全过程，对相关算法进行了详细论述．结合工艺流程时首先将二维版图文件预处理，加载器件工艺流程后，程序实现相关参数选择后并存储．给定了工艺步骤的搭配关系，进行工艺解释后，进行三维实体绘制输出．编程实现的可执行文件可对多种MEMS器件进行正确的三维描述，从而验证了该三维生成的方法．
英文摘要：
A kind of three-dimensional structure building method of MEMS device is presented. The whole procedure of realizing 3-dimensional structure conversion is introduced. Some related algorithms of polygon partition, process explanation and 3-dimensional structure building have been emphasized here. According to process flows and parameters of MEMS device chosen by user, conversion is implemented from pretreating of 2-dimensional layout file to loading of process flows, from correlative parameters choosing to process steps matching, up to processes explanation in the end to realize 3-dimensional solid structure of devices. Based on above course, an executable file is built by programming. Some kinds of MEMS devices have been described correctly in 3-dimensional space by the executable file which validates this three-dimensional building method.
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