设计构建了一光学薄膜激光损伤测试平台,通过图像检测法,激光散射法两种方法综合测试、评价损伤阈值。本系统由激光器、扩束、衰减、分光、散射探测、CCD探测等部分组成。对溶胶凝胶法制备的SiO2薄膜进行激光损伤阈值测试,实验表明,此测试平台可准确的测量损伤阈值,为研究薄膜的抗激光损伤提供了有效的测试手段。
A laser damage test platform for optical film is designed. The damage threshold is tested and evaluated through the image detection and laser scattering. The system consists of a laser, beam expander, attenuator, scattering detector, optical detection, CCD, etc. Laser damage of SiO2 thin film threshold is tested, the thin film is prepared by sol gel method. The experiments show that this test platform can accurately measure the damage threshold and provide ef- fective means to study laser damage of the thin film.