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Young's modulus and residual stress of MEMS gold beams based on the GaAs MMIC process
  • ISSN号：0960-1317
  • 期刊名称：Journal of Micromechanics and Microengineering
  • 时间：2013.4.4
  • 页码：1-6
  • 相关项目：基于MEMS功率传感器的无线接收式微波频率检测集成系统的设计理论和实现方法的研究
作者： Yang, Gang|Liao, Xiaoping|Zhang, Zhiqiang|
同期刊论文项目
基于MEMS功率传感器的无线接收式微波频率检测集成系统的设计理论和实现方法的研究
期刊论文 34 会议论文 8 专利 3
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