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GaAs MMIC fabrication for the RF MEMS power sensor with both detection and non-detection states
  • ISSN号：0924-4247
  • 期刊名称：Sensors and Actuators A: Physical
  • 时间：2012.12.12
  • 页码：29-34
  • 相关项目：基于MEMS功率传感器的无线接收式微波频率检测集成系统的设计理论和实现方法的研究
作者： Zhang, Zhiqiang|Liao, Xiaoping|
同期刊论文项目
基于MEMS功率传感器的无线接收式微波频率检测集成系统的设计理论和实现方法的研究
期刊论文 34 会议论文 8 专利 3
同项目期刊论文
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Research on sensitivity characteristic of indirectly-heated type thermopile power sensor
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A Thermocouple-Based Self-Heating RF Power Sensor With GaAs MMIC-Compatible Micromachining Technolog
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