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Sensitivity of MEMS microwave power sensor with the length of thermopile based on Fourier equivalent
  • ISSN号：1674-4926
  • 期刊名称：Chinese Journal of Semiconductors
  • 时间：2011
  • 页码：1-5
  • 相关项目：基于MEMS功率传感器的无线接收式微波频率检测集成系统的设计理论和实现方法的研究
作者： Liu, Tong|Liao, Xiaoping|Wang, Debo|
同期刊论文项目
基于MEMS功率传感器的无线接收式微波频率检测集成系统的设计理论和实现方法的研究
期刊论文 34 会议论文 8 专利 3
同项目期刊论文
A novel MEMS double-channel microwave power sensor based on GaAs MMIC technology
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Thermoelectric power detector for microwave application at X-band based on GaAs MMIC technology
Young's modulus and residual stress of MEMS gold beams based on the GaAs MMIC process
A lumped model with phase analysis for inline RF MEMS power sensor applications
A capacitive power sensor based on the MEMS cantilever beam fabricated by GaAs MMIC technology
Micromachined Passive Bandpass Filters Based on GaAs Monolithic-Microwave-Integrated-Circuit Technol
A three-channel thermoelectric RF MEMS power sensor for GaAs MMIC applications
Optimization of Indirectly-Heated Type Microwave Power Sensors Based on GaAs Micromachining
Micromachined GaAs MMIC-Based Spiral Inductors With Metal Shores and Patterned Ground Shields
A 35 GHz wireless millimeter-wave power sensor based on GaAs micromachining technology
毫米波MEMS开关S参数在开关过程中的瞬态变化
Research on sensitivity characteristic of indirectly-heated type thermopile power sensor
A voltage source model on thermoelectric power sensor based on MEMS technology
A GaAs MMIC-based coupling RF MEMS power sensor with both detection and non-detection states
X-band coplanar Wilkinson power divider based on GaAs MMIC technology
X-band microwave phase detector manufactured using GaAs micromachining technologies
A Thermoelectric Power Sensor and Its Package Based on MEMS Technology
Package solution of indirectly-heated type thermoelectric power sensors for RF application
Packaging-Test-Fixture for In-Line Coupling RF MEMS Power Sensors
A Novel Thermoelectric and Capacitive Power Sensor With Improved Dynamica Range Based on GaAs MMIC T
GaAs MMIC fabrication for the RF MEMS power sensor with both detection and non-detection states
Modeling of the terminating-type power sensors fabricated by GaAs MMIC process
A Thermocouple-Based Self-Heating RF Power Sensor With GaAs MMIC-Compatible Micromachining Technolog
Modeling and design of a capacitive microwave power sensor for X-band applications based on GaAs tec
基于GaAs MMIC技术的残余应力测试结构的模拟与设计
毫米波MEMS开关自激励机理实验验证结构的模拟与设计
期刊信息
  • 《半导体学报：英文版》
  • 中国科技核心期刊
  • 主管单位:中国科学院
  • 主办单位:中国电子学会 中国科学院半导体研究所
  • 主编：李树深
  • 地址：北京912信箱
  • 邮编：100083
  • 邮箱：cjs@semi.ac.cn
  • 电话：010-82304277
  • 国际标准刊号：ISSN：1674-4926
  • 国内统一刊号：ISSN：11-5781/TN
  • 邮发代号:2-184
  • 获奖情况:
  • 90年获中科院优秀期刊二等奖,92年获国家科委、中共中央宣传部和国家新闻出版署...,97年国家科委、中共中央中宣传部和国家新出版署三等奖,中国期刊方阵“双效”期刊
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  • 俄罗斯文摘杂志,美国化学文摘（网络版）,荷兰文摘与引文数据库,美国工程索引,美国剑桥科学文摘,英国科学文摘数据库,日本日本科学技术振兴机构数据库,中国中国科技核心期刊,中国北大核心期刊（2004版）,中国北大核心期刊（2008版）,英国英国皇家化学学会文摘,中国北大核心期刊（2000版）
  • 被引量:7754