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On-Chip Integration of Acceleration, Pressure, and Temperature Composite Sensor With a Single-Sided
ISSN号:1057-7157
期刊名称:Journal of Microelectromechanical Systems
时间:2011.2
页码:42-52
相关项目:微纳流控系统跨尺度兼容一体化集成制造基础研究
作者:
Wang, Quan|Li, Xinxin|Li, Tie|Bao, Minhang|Zhou, Wei|
同期刊论文项目
微纳流控系统跨尺度兼容一体化集成制造基础研究
期刊论文 110
会议论文 41
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