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Single-Side Fabricated Pressure Sensors for IC-Foundry-Compatible, High-Yield, and Low-Cost Volume P
  • ISSN号：0741-3106
  • 期刊名称：IEEE Electron Device Letters
  • 时间：2011.7
  • 页码：979-981
  • 相关项目：微纳流控系统跨尺度兼容一体化集成制造基础研究
作者： Wang, Jiachou|Li, Xinxin|
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微纳流控系统跨尺度兼容一体化集成制造基础研究
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