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Precise extension-mode resonant sensor with uniform and repeatable sensitivity for detection of ppm-
  • ISSN号：0960-1317
  • 期刊名称：Journal of Micromechanics and Microengineering
  • 时间：2014.4
  • 页码：-
  • 相关项目：微纳流控系统跨尺度兼容一体化集成制造基础研究
作者： Yu, Feng|Yu, Feng|Yu, Haitao|Yu, Haitao|Xu, Pengcheng|Xu, Pengcheng|Li, Xinxin|Li, Xinxin|
同期刊论文项目
微纳流控系统跨尺度兼容一体化集成制造基础研究
期刊论文 110 会议论文 41
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