中文摘要：

将SiGe材料的优异性能与半超结结构的优势相结合,提出了一种半超结SiGe功率二极管,可适应高频化电力电子电路对功率二极管低通态压降、高击穿电压、较小的反向漏电流以及快而软的反向恢复特性的要求,显著提高器件的各种特性.

英文摘要：

Semi-super junction（S-SJ） is developed on the basis of the super junction（SJ） structure by adding BAL（bottom assist layer） in the base region.One should only adjust the depth and the doping concentration of the BAL in the S-SJ structure to obtain higher working voltages.At the same on resistance,the aspect ratio of p-column in the S-SJ structure is less than that in the super junction structure,which means simpler process of epitaxial growth and ion implantation,which is very effective in reducing the process difficulty and the manufacture cost.Because the band gap of SiGe material can be adjusted by changing the Ge fraction and the epilayers strain,the carrier mobility is increased with the increasing Ge content,the manufacture process is compatible with Si process,and great importance has been gradually attached to the SiGe material.To meet the requirements of low forward conducting voltage drop,high breakdown voltage,minimum reverse leakage current,and fast and soft reverse recovery process for power diodes in high frequency power electronics circuits,a S-SJ SiGe diode with remarkable improvement in all these characteristics of present power diode is proposed by combining both merits of S-SJ structure and SiGe material in this paper.