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中文摘要：
利用严格耦合波理论分析了纳米孔阵列薄膜的光学特性,提出将纳米孔阵列薄膜作为光伏器件增透膜来提高器件的光吸收和转换效率.理论分析表明：纳米孔阵列薄膜比单层增透膜有更好的增透效果,能够更好地提高光伏器件的转换效率,在400 nm-600 nm波段尤为显著.纳米孔阵列薄膜的最优结构参数：周期为500 nm,填充率为0.2,厚度为110 nm.采用微纳加工技术,在φ200μm Si探测器的增透膜上制作了不同周期的纳米孔阵列,并搭建了相应的测试系统.实验结果表明：周期为500 nm时器件的性能提高最为明显,短路电流在400 nm—1100 nm波段提高约为6%,在400 nm—600 nm波段提高约为15%;开路电压提高约为2%.纳米孔阵列薄膜能够很好地提高光伏器件的转换效率.
英文摘要：
The optical characteristic of the nanohole array film is analyzed by using rigorous coupled wave,and the nanohole array film is proposed to serve as photovoltaic device anti-reflection film to improve the device absorption and efficiency.According to theoretical analysis,nanohole array anti-reflection film has a better anti-reflection effect than the monofilm and can better enhance the photovoltaic device＇s efficiency,especially in a speetral range of 400 nm-600 nm;the optimal period of the nanohole array is 500 nm,the optimal filling factor of the nanohole array is 0.2 and the optimal thickness of the nanohole array is 110 nm.In order to testify the optical effect of nanohole array,the nanohole arrays of different sizes are made by the micro-nano processing technology in the anti-reflection film of theφ200μm Si Detector,and a relevant experimental system is set up.With the optimized nanohole arrays,the short circuit currents of the experimental sample are increased～6%in a 400—1100 nm spectral range,especially,increased～15%in a 400 nm—600 nm spectral range.
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