中文摘要：

157nm激光被视为光刻和微加工的有力工具之一，其加工的表面质量强烈依赖于激光参数。针对157nm微加工的特点，提出建立人工神经网络优化工艺参数的方法。分析与实验结果表明，利用优化的工艺参数进行激光微加工，其刻蚀质量得到明显提高。

英文摘要：

157nm laser is considered as one of robust tools for microlithography or micromachining and the surface quality which is ablated by 157nm laser strongly depends on laser parameters. Establishing the model of Artificial Neural Network aim to op- timize process parameters is proposed based on the features of laser micro-machining process. The analysis and experiment show that the ablation quality of laser micro-machining was improved by utilizing the optimized process parameters.