在分析时栅传感器结构和信号特点的基础上,提出了基于时空坐标转换方法的增量式时栅位移传感器设计方法,分析了控制系统中控制信号的增量式实现及其特殊性。通过对几种传感器信号特点的比较,解决了增量式时栅位移传感器的关键技术难题。
The method for time-space coordinate transformation (TST) was presented. The characteristics of time grating structure and signal were analyzed. Based on the TST method, an incremental realization method for time grating displacement sensor was proposed to meet the requirements of the applications in computer numerical control field. Signal characteristics of several kinds of sensors were compared, then the incremental realization mode and technical scheme were proposed. Experimental results conform the validity of the proposed methods.