中文摘要：

时栅是一种利用时间测量空间位移的新型位移传感器。研究智能化技术可以充分利用软件来提高时栅的精度、改善时栅的性能。提出一种基于数字闭环控制技术的时栅自补偿方法,消除了工作条件、电路参数变化等因素的影响。提出一种实现时栅自校零与自校准的方法,无需外部高精度基准信号,消除了时栅零点漂移和增益漂移。并提出一种实现时栅误差自校正的方法。实践证明,采用自补偿、自校零与自校准技术实现了时栅的高稳定度,采用自校正技术实现了时栅的高精度。

英文摘要：

Time grating is a novel type of displacement sensor based on measuring space with time. To improve the precision of time grating displacement sensor and enhance its performance by software, three intelligentization methods are studied. A self-compensation method is proposed based on digital closed-loop control technology that eliminates the influences of the factors such as working conditions, circuitry parameters and so on. A self-calibration method for time grating is presented that eliminates zero drift and gain drift without external high-precision reference signals . Then an error self-correction method is proposed. Experiment results conform that high stability is obtained by using self-compensation and self-calibration technology, and high accuracy is achieved by using self-correction technology.