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Characterizations of removal rate and temperature inthe inductively coupled plasma etching of silico
  • ISSN号：0878-492569
  • 期刊名称：Key Engineering Materials
  • 时间：2016.2.1
  • 页码：85-90
  • 相关项目：自由曲面光学零件的大气等离子体射流加工技术基础研究
作者： Peng Zhang|Qiang Xin|Jiang Jin|Bo Wang|
同期刊论文项目
自由曲面光学零件的大气等离子体射流加工技术基础研究
期刊论文 18 会议论文 6 专利 26
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大气等离子体加工过程的原子发射光谱研究
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