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Surface roughening of ground fused silica processed by atmospheric inductively coupled plasma
  • ISSN号：0169-4332
  • 期刊名称：Applied Surface Science
  • 时间：2015.6.30
  • 页码：142-148
  • 相关项目：自由曲面光学零件的大气等离子体射流加工技术基础研究
作者： Wang, Bo|Li, Guo|Ding, Fei|Jin, Huiliang|
同期刊论文项目
自由曲面光学零件的大气等离子体射流加工技术基础研究
期刊论文 18 会议论文 6 专利 26
同项目期刊论文
Surface Quality Improvement of Atmospheric Pressure Plasma Polishing (APPP) in Machining of Silicon
Development of material removal function in atmospheric pressure plasma jet machining processing
Atmospheric Pressure Plasma Processing of Fused Silica in Different Discharge Modes
Research on the Atomic Emission Spectroscopy of Atmospheric Pressure Plasma Process
大气等离子体加工过程的原子发射光谱研究
Study of form control algorithm in atmospheric pressure plasma processing
Study on the key influencing factors in atmospheric pressure plasma processing of fused silica
The morphology and chemistry evolution of fused silica surface after Ar/CF4 atmospheric pressure pla
Researchon the Electron Temperature and Emission Spectroscopy of the AtmosphericInductively Coupled
微结构光学零件的大气等离子体数控加工
大气压等离子体射流加工材料去除函数模型
氦气流量和加工时间对大气等离子体温度的影响
Characterizations of removal rate and temperature inthe inductively coupled plasma etching of silico
Numerically controlled atmospheric pressure plasma processing of micro-structured optics