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Thermoelastic damping in micromechanical resonators with a proof mass and a network of suspension be
  • 期刊名称：Japanese Journal of Applied Physics
  • 时间：2011.7.7
  • 页码：077202-
  • 相关项目：扭转式微机械谐振器件的扭转-弯曲耦合热弹性阻尼机理
作者： Pu Li|Rufu Hu|
同期刊论文项目
扭转式微机械谐振器件的扭转-弯曲耦合热弹性阻尼机理
期刊论文 10 会议论文 1 专利 3
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