中文摘要：

在MEMS执行器的设计中,求出准确的pull-in参数是至关重要的。在过去的研究中,在准静态假设下,电压控制的MEMS微执行器的pull-in模型已经被提出,并且还提出了一些拓宽微执行器稳定行程的方法。在动态条件下,电压控制的MEMS微执行器的pull-in模型也已经被提出。但是,还没有人研究如何提高微执行器动态稳定行程。采用串联电容的方法来拓宽MEMS执行器的动态稳定行程,提出了串联电容后的动态pull-in模型。最后,采用数值解法模拟了串联电容后的动态pull-in现象,并同时考虑了阻尼的影响。

英文摘要：

Predicting the pull-in parameters is crucial in the design of MEMS actuators.In the past,under quasi-static assumptions,the model for pull-in parameters of voltage controlled MEMS actuators has been given and some techniques were used to extend the stable range of the microactuators.Under dynamic conditions,the model for dynamic pull-in parameters of voltage controlled MEMS actuators has also been given.However,no studies are done to extend the dynamic stable range of the MEMS actuators.This paper uses a voltage source with a series capacitance to extend the dynamic stable range of the MEMS actuators.Dynamic pullin parameters of voltage controlled MEMS actuators with a series capacitance have been presented.Finally,numerical method is used to simulate the dynamic pull-in behavior under the effect of the series capacitance.The effect of damping is also included in the numerical method.