中文摘要：

从驱动方式和机械结构的角度介绍了不同的RF MEMS开关类型，分析了各类MEMS开关的性能及优缺点，分析了MEMS开关在制作和发展中面临的牺牲层技术、封装技术、可靠性问题等关键技术和问题，介绍了MEMS开关的发展现状及其在组件级和系统级的应用，以及对MEMS开关技术的展望。

英文摘要：

Introduced different types of MEMS switch from two perspectives ：actuation way and mechanical structure, analyzed the performances, advantages and disadvantages of all kinds of MEMS switches, and the key technology in the production of MEMS switch ,the problems faced in the development： sacrificial layer technology, packaging technology and reliability issues. At length, this paper introduced the present situation of MEMS switch , the application in component level and system level and the prospect of MEMS switch technology.