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Oxygen precipitation in heavily phosphorus-doped silicon wafer annealed at high temperatures
  • ISSN号：0921-5107
  • 期刊名称：Materials Science and Engineering B-Advanced Funct
  • 时间：0
  • 页码：145-148
  • 语言：英文
  • 相关项目：重掺磷直拉硅单晶的微缺陷研究
作者： Chen, Jiahe|Zeng, Yuheng|Yang, Deren|Que, Duanlin|Ma, Xiangyang|
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重掺磷直拉硅单晶的微缺陷研究
期刊论文 7 会议论文 2 专利 1
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