中文摘要：

采用溶胶-凝胶法，以正硅酸乙酯为前驱体，氨水为催化剂，通过六甲基二硅氮烷（HMDS）对溶胶改性，使用提拉法镀膜，并经过低温热处理制备了具有良好防潮抗真空性能的SiO2减反膜．对薄膜的防潮性能、水接触角、真空抗污染能力、结构等进行了测试表征．结果表明：掺HMDS的溶胶制备的二氧化硅膜层峰值透过率为99．7％；水接触角可达154°；在相对湿度大于90％的环境中保存7天和在二甲基硅油作为污染源的真空环境中放置30天，透过率仅分别下降0．05％和0．35％，防潮耐真空稳定性较未改性薄膜都得到极大提高．

英文摘要：

Silica coating were prepared via sol-gel method at low temperature, using tetraethylorthosilicate （TEOS） as precursor and ammonia as catalyst. Hexamethyldisilazane （HMDS） was added into the standard SiO2 sols to obtain organosilane modified silica sols. The moisture proof, water contact angle and vacuum contamination resistance property of samples were characterized. The research revealed that the HMDS modified coating have peak transmittance above 99.7%, water contact angle is 154°. The samples were placed in the environment of relative humidity （RH） more than 90% for 7days, and the environment of the vacuum that has dimethyl silicone oil as a pollutant for 30days, the transmittance only fell by 0. 05° and 0. 35% respectively. HMDS modified coating moisture proof and vacuum contamination resistance property get greatly improve than unmodified coating.