中文摘要：

针对惯性约束聚变中靶球筛选操作的粘着问题,提出一种基于压电驱动控制的微操作方法,并结合微机电系统（MEMS）技术和微驱动方法,研制压电驱动操作模块用于实验研究。首先,分析微尺度对象粘着机理并进行粘着接触模型的建立,并在此基础上提出对操作工具施加振动,利用惯性力作用克服粘着力的动态操作方法;同时,结合靶球筛选操作的特点,分析操作控制策略;最后建立了基于压电驱动的微操作实验系统。针对直径φ50～400μm的靶球对象进行操作实验,成功实现了靶球样品的高效、准确拾取和释放,拾取和释放成功率大于90%。

英文摘要：

Aiming at the adhesion problems in the manipulation of target spheres used in the inertial confinement fusion, a method based on the control of piezoelectric actuator to manipulate micro spheres is presented in this paper. Combined with MEMS technology and the micro-driving method,a piezoelectric Ceramics module has been developed for the experimental studies. Firstly, the adhesion mechanism of micro spheres is analyzed and the adhesion model for the micromanipulation is established. Based on the theory, the vibration is proposed to operate the micro spheres. The inertia force is used to overcome the adhesion force. The control strategy is conducted, and the micromanipulation system is set up. Finally, experiments are carried out through the manipulation of φ50～400μm spheres. Experimental results show that this method can achieve repeatability better than 90% in the picking and releasing operation.