中文摘要：

为系统研究不同波长激光与多晶硅材料的相互作用,采用1 064 nm、532 nm、355 nm波长单脉冲激光对多晶硅进行辐照实验,研究多晶硅在这三种波长激光下的损伤形态。实验结果表明：在其他参数不变的情况下,损伤阈值随激光波长的减小而变小,且与波长呈线性关系;在低能量密度水平下,355 nm激光与物质作用主要是以光化学模型为主的光化学-光热共同作用方式,其他波长为光热模型;在激光能量密度处于低水平时,辐照区域出现相互连接的规则六边形微结构,并且六边形中心呈现圆形凸起状态,其产生是由液体横向流动的波动本质造成的,并与多晶硅表面的粗糙度有关。

英文摘要：

The wavelengths of 1 064 nm, 532 nm and 355 nm single-pulse laser were used to irradiate the polysilicon to study the interaction between different wavelengths of laser with polysilicon material systematically. The damage patterns of the polysilicon under the three laser wavelengths were studied.Experimental results shows that： with other parameters unchanged, the damage threshold decreases with the laser wavelength becomes smaller and it has linear relationship with laser wavelength; At low energy density level, the model of the interaction between the wavelength of 355 nm laser and material is photochemical model based on the photochemical-photothermal common mode of action and it is light and heat model for other wavelengths; When the laser energy density is in low level, the interconnected regular hexagonal microstructure appears in the irradiated area. The center of the hexagon presents circular convex status. It is generated by nature of lateral flow fluctuations of the liquid and it has relation with the roughness of the polysilicon surface.