中文摘要：

采用非平衡磁控溅射法制备了2种不同结构的TiO2薄膜，对所得TiO2薄膜分别运用碱处理和酸处理2种化学方法进行表面处理，期望在材料表面获得羟基活性基团。运用X射线衍射（XRD）、X射线光电子能谱仪（XPS）等手段研究了薄膜的表面结构、成分等。利用傅立叶红外技术（FTIR）对活化处理前后样品表面的羟基基团进行检测，同时利用四探针测试仪对薄膜的电阻率进行了测量。结果表明，运用碱处理和酸处理2种方法，可以在锐钛矿型TiO2薄膜表面形成活性羟基基团；相比于金红石型TiO2薄膜，锐钛矿型具有较好的羟基活化能力。

英文摘要：

In this paper, two Ti-O films with different crystal structure were synthesized by unbalanced magnetron sputtering system. The crystal structure of films was characterized by the X-ray diffraction （XRD）. The components of the films were characterized by X-ray photoelectron spectroscopy （XPS）. The Ti-O films were then treated by alkali solution and acid solution. The hydroxyl functional group was detected by fourier transform Infrared spectrometer （FFIR）. The results showed that, compared to films of rutile structure, anatase Ti-O film has the better hydroxyl bioactivity. Meanwhile the contact angle of the active Ti-O film with water decreased after treated by alkali solution and acid solution. In addition, this work further discussed the relationship between the Ti-O film structure and its bioactivity.