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Reflective shearing point diffraction interferometer
  • ISSN号：0895-2477
  • 期刊名称：Microwave and Optical Technology Letters
  • 时间：2015
  • 页码：2845-2848
  • 相关项目：短相干光显微干涉理论及摆臂式轮廓仪的非接触测量方法研究
作者： Lei Chen|Chenfeng Gu|Jun Wan|Donghui Zheng|
同期刊论文项目
短相干光显微干涉理论及摆臂式轮廓仪的非接触测量方法研究
期刊论文 26 会议论文 2
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