中文摘要：

利用直流磁控反应溅射技术在玻璃衬底上沉积了单相Ag2O薄膜,并采用真空热退火对单相Ag2O薄膜在不同热退火温度（TA）下进行了1h热处理.利用X射线衍射谱、扫描电子显微镜和分光光度计研究了TA对单相Ag2O薄膜微结构和光学性质的影响.研究结果表明,TA=300℃时Ag2O薄膜中开始出现Ag纳米颗粒,且随着TA的升高薄膜中Ag的含量明显增加.特别是当TA=475℃时Ag2O相完全转化为Ag.随着TA的升高,薄膜的表面形貌发生了由致密到疏松的结构演变.薄膜微结构的变化显示在真空热退火过程中伴随着Ag2O相热分解为Ag和O原子及O原子在体内的扩散和从表面的逃逸过程.薄膜的透射率、反射率和吸收率随TA的变化归结于热退火过程中Ag2O的热分解和薄膜结构的演变.

英文摘要：

A single-phased Ag2 O film was deposited on glass substrate by direct-current reactive magnetron sputtering,and was then vacuum thermally annealed at different annealing temperatures （ TA ） for 1 hour. Effect of the TA on the film＇s microstructure and optical properties was investigated by X-ray diffractometry, scanning electron microscopy and spectrophotometry. The results indicate that Ag nano-scaled particles begin to appear in the annealed Ag2 O film at TA = 300 ℃ . The Ag content obviously increases with increasing TA,and in particular,Ag2 O phase is completely transformed into Ag at TA = 475 ℃ . The evolution of the film＇s surface morphology from dense to loose indicates that the diffusion and escape of O atoms from film surface accompanied the thermal decomposition reaction of Ag2 O to Ag particles during the vacuum thermal annealing. The changes of the film＇s transmissivity,reflectivity and absorptivity with TA are attributed to the thermal decomposition of Ag2 O and the film＇s structure evolution during annealing.