中文摘要：

采用溶胶-凝胶旋涂法，以醋酸锌、乙二醇甲醚和乙醇胺为反应前驱物，在不同前热处理温度下制备了ZnO纳米薄膜。采用XRD和SEM研究了前热处理温度对ZnO薄膜微结构的影响，并剖析了溶胶溶液中存在的反应和产物。单采用前热处理得不到结晶性很好的（002）择优取向的ZnO纳米薄膜。当前热处理温度为250℃时，经过400℃后热处理后ZnO薄膜的（002）择优取向性最佳。前热处理时湿膜中未完全分解的有机物在后热处理过程中的分解，以及过高的前热处理温度使得凝胶网络中的有机物剧烈脱附，对凝胶网络结构造成损伤，不利于薄膜（002）择优取向生长，前者是造成薄膜出现微米尺度均匀褶皱的根本原因。

英文摘要：

Nano-ZnO films were prepared at different preheating temperatures by using sol-gel spin-coat-ing technique with zinc acetate dehydrate, 2-methoxyethanol and ethanolamine as precursors. The effects of the preheating temperature on the film microstructure were studied by using XRD and SEM. In addi-tion, the reactions and products involved in the sol solution were also proposed. Using preheating alone could not obtain the （ 002 ） highly-oriented ZnO film. The strongest （ 002 ） orientation was obtained at preheating temperature of 250℃ for the post-heated ZnO film at 400℃. The decomposition of the residu-al organic complex within the wet film during the preheating and the strong desorption of the organic com-plex within the gel net during the post-heating did harm to the （002）-oriental growth of the film. The for-mer was the key reason for the formation of micron-scaled uniform wrinkle on the film surface.