中文摘要：

基于应变协调理论模型推导出薄膜弹性模量和泊松比表达式，对普通拉伸试验法进行了改进，即采用分区不同膜厚拉伸法分别研究了氧化铝薄膜／铝合金基体系统和氮化钛薄膜／高速钢基体系统上不同厚度薄膜的弹性模量和泊松比。结果表明：该方法可有效地减少薄膜制备、拉伸试验中偶然因素以及基体材料等对所测薄膜弹性性能的影响。通过不同厚度薄膜弹性模量的对比，可知2种体系薄膜的弹性模量随膜厚的增加而提高。分析认为薄膜内应力的状态、大小以及在薄膜厚度方向的重新分配等因素对薄膜弹性模量有很大影响。

英文摘要：

The expressions of elastic modulus and Poisson＇s ratio of films were deduced from a strain harmony theory. An improved tensile method was proposed to study the elastic modulus and Poisson＇s ratio of Al2O3 films in Al-alloy substrate system and TiN films on HSS substrate system. In this method, the thickness of the films varies on different sections of the gauge-length for a same specimen. The results show that the method is an efficient way to reduce the effects of occasional factors （such as the films prepared-technology, the occasional factors emerge in tensile testing and the effect of substrate etc） on the testing the mechanical properties of films. By investigating the elastic modulus of the films with different thickness, it is found that the elastic modulus increases with increasing of thickness for both films. It is indicated that the stress status, stress value in films and the redistribution of the interior stress near the interface have great influence on the elastic modulus of films.