中文摘要：

采用多弧离子镀在W6M05Cr4V2高速钢上沉积五种不同厚度TiN涂层，用曲率法和有限元法研究TiN涂层残余应力和构成。结果表明涂层厚度对其残余应力有很大影响，特别是对本征应力。当涂层厚度从3μm变化到11μm时，TiN涂层总残余应力分布在-3．12～-2．29GPa之间；热应力分布在-1．96～-1．92GPa之间；本征应力分布在-1．17～-0．37GPa之间。其中热应力所占的比例较大，约占62％-68％。当膜基比ξ〈0．017时，总残余应力随ξ的增加呈非线性增加：当ξ=0．017时，该值达到最大值-3．12GPa；当ξ〉0．017时，该值随掌的增加而下降。造成这种变化的主要原因是涂层本征应力受涂层结构影响较大，随着涂层厚度的增加，涂层中孔洞、过冷液滴以及界面微裂纹等缺陷也随之增加，导致涂层中本征应力得到有效释放。

英文摘要：

Multi-arc ion plating technique is adopted to deposite five different thickness TiN coatings on W6Mo5Cr4V2 high speed steel.A curvature method and a finite element method are used to study the TiN coatings residual stresses.Results show that TiN coatings thickness affects greatly on residual stresses,especially on intrinsic stresses.When the coatings thickness changes from 3 μm to 11 μm,the total residual stresses of TiN coatings change from-3.12 GPa to-2.29 GPa,the intrinsic stresses from-1.17 GPa to-0.37 GPa,the thermal stresses from-1.96 GPa to-1.92 GPa.The proportion of thermal stresses in the total residual stresses is about 62%～68%.The TiN residual stresses increase nonlinearly with the increasing coatings thickness,when the ratio of TiN coatings thickness to substrate thickness ξ is 0.017,the total residual stresses reach to the maximum value-3.12 GPa,then decrease with the increasing ξ value.These changes are ascribed to the intrinsic stresses,which are greatly affected by the defects in the TiN coatings,such as the micro-holes,supercooled liquid drops and micro-cracks in the interface between the coatings and the substrate,increase with the increasing TiN coatings thickness,which causes the intrinsic stresses in TiN coatings to release effectively.