简述了ITO薄膜的各种性能和主要应用,综述了国内外ITO靶材的主要成形、烧结工艺及其研究现状.概括了ITO靶材的发展趋势。
The performance and application of ITO film were described; the forming and sintering processes in China and abroad were summarized; the developing trend of ITO target was prospected.