中文摘要：

以高纯度的ZnO、In2O3和Ga2O3等氧化物粉末为原料,经过球磨充分混合并细化后,采用固相烧结反应法制备IGZO（indium gallium zinc oxide）粉末,利用X射线衍射（XRD）与扫描电镜（SEM）对该粉末的物相组成、颗粒表面形貌与粒径等进行观察与分析,研究烧结温度、保温时间及球料质量比对IGZO粉末形貌与结构的影响。结果表明：在保温时间为6 h的条件下,烧结温度为1 100℃时,Ga2O3和ZnO反应生成ZnGa2O4,所得粉末以ZnGa2O4相为主,仍有In2O3未发生反应;在1 200和1 300℃下烧结均可得到表面形貌不规则的In Ga ZnO4单相粉末,1 200℃下烧结的粉末粒径明显小于1 300℃烧结粉末的粒径。1 200℃下烧结4 h及以上即可保证固相反应完全,得到InGaZnO4单相粉末。随球料质量比增大,粉末颗粒细化。球料质量比为10：1和15：1条件下制备的IGZO粉末粒径相近,但明显比球料质量比为5：1条件下制备的粉末更细。

英文摘要：

IGZO （Indium gallium zinc oxide） powders were prepared by solid-phase sintering reaction using high purity powders of ZnO, In2O3 and Ga2O3 as raw materials according to a certain molar ratio after the course of ball milling. Then the powder was tested by X-ray diffraction （XRD） to analyze the phase composition and by scanning electron microscopy （SEM） to observe the surface morphology and particle size of the powder. The effects of sintering temperature, holding time and the mass ratio of ball and feed on the performance of the IGZO powders were studied. The results showed that： Ga2O3 and ZnO react to ZnGa2O4 at the sintering temperature of 1 100 ℃ for 6 h, and the ZnGa2O4 phase is the main component of the resulting powder, while there still exists In2O3 which does not react. When the sintering temperature is 1 200-1 300 ℃, the product is only composed of InGaZnO4 single-phase powder with irregular surface morphology, and the particle size of the powder at 1 200℃ is smaller than that at 1 300 ℃. InGaZnO4 single-phase powder is obtained at the sintering temperature of 1 200℃for 4 h or more, which can ensure that the solid phase reaction is complete. With the mass ratio of ball and feed increases, the powder particles become smaller. When the mass ratios of ball and feed are 10：1 and 15： 1, the particle size of IGZO is similar, but these two are smaller than that at the ratio of 5：1 significantly.