介绍了ITO靶材的各种性能及应用,综述了目前常用的几种靶材成形方法和烧结工艺以及他们的研究现状,并对ITO靶材今后的发展趋势进行了展望。
The properties and applications of ITO target were described. The common forming methods, sintering process and its research status were summarized. Meanwhile, the future development trend of ITO target was prospected.