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中文摘要：
利用化学溶液电沉积方法，在阴极和阳极衬底材料上都成功制备出了单相的含氧酸盐硅酸锂（Li2SiO3）薄膜。探讨了该工艺下的实验反应机理。通过X射线衍射技术（XRD）、扫描电子显微镜（SEM）分别表征研究了不同实验条件下薄膜的晶体结构和表面形貌。研究结果表明，采用化学溶液电沉积法制备的Li2SiO3薄膜具有物相结构单一，表面形貌平整致密的特点。与制备Li2SiO3的传统方法相比，这一技术具有廉价、简单、低温等特点。
英文摘要：
Mono-phase Li2SiO3 thin film has been prepared on Mo substrate by developed electric field associated chemical solution method. The characteristics of the crystal structure, the surface morphology of the thin films were investigated by using X-ray diffraction （XRD）, scan electric microscopy（SEM）, respectively. The influence of the processing parameters on the fabrication of the films was studied experimentally. XRD analyses reveal that Li2SiO3 thin films prepared are well poly-crystalline thin films. Comparing with the conventional lithium metasilicate fabrication techniques, the technique in present work is a component-controllable and low temperature synthesizing processing.
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