本文提出可集成自提取结终端的0.35μm150V—BCD(双极一互补金属氧化物半导体一双重扩散金属氧化物半导体)全套新型高压工艺.利用此工艺研制出100V场致发光用高低侧驱动芯片,并提出了基于双极器件BC(双极集电极)结短路自提取结终端新工艺与新结构,既可满足场致发光高压驱动芯片应用,又能取代传统采用氧化扩散工艺的P-ISO(P型隔离结构)传统隔离结构,显著简化了工艺和提高了芯片的高集成度,确保片内集成的低电阻率VDN—MOS/LDPMOS(N型垂直双扩散金属氧化物半导体场效应晶体管/P型横向扩散金属氧化物半导体场效应晶体管)高压驱动模块与低压逻辑控制模块在100V高压脉冲交替工作状况下无负电位、EMMI(微光显微镜)等寄生现象出现.
A high voltage BCI)(Bipolar-CMOS-DMOS)technology by using self-extracted JTE(Junction Termination Exten- sion)lxench isolation based on 0.35gin standard CMOS(Complementary Metal Oxide Semiconductor)process has been developed for LCD( Liquid Crystal Display) backlight application. In this technology, HV ( High Voltage) circuit block, including low cost VDN- MOS( Vertical Double Diffused N-MOS ) and LDPMOS ( Laterally Diffused P-MOS ) with resurf principle, and LV ( Low Voltage) block are integrated together. Advanced deep trench isolation technology which has higher integration than conventional P-type isola- tion is firstly implemented to protect LV block from HV block and sustain the d v/dt, d i/dt effect with self-extracted function. The breakdown voltage is above 150V. Finally,it is shown that the performance of designed IC driver can satisfy the EL(Electrolumi- nescent Lamps)lamp application with frequency at least 400Hz of the switch signal and the power supply is about 100V.For the simplicity of the silicon technology, the cost is saved.