中文摘要：

通过循环伏安法等方法研究了氧化铟锡（ITO）透明导电薄膜的电化学行为．获得了ITO薄膜在NaOH溶液中阴极和阳极极化处理前后的循环伏安曲线．采用透射光谱，方块电阻测试，扫描电子显微镜（SEM），能量色散X射线荧光光谱（EDS）与X射线衍射（XRD）表征1TO薄膜经电化学处理后的反应产物．结果表明，ITO薄膜在阳极处理后（约为＋1．5V（vs SCE））保持了稳定的成分和结构．但经阴极处理后（约为-1．5V（vsSCE））发生了严重的电化学腐蚀，可见光透射率大幅下降，方块电阻增加一个数量级．经SEM、EDS和XRD表征分析，证明阴极处理过程使ITO薄膜中的In^3＋还原成了In单质．

英文摘要：

The electrocbemical corrosion behaviors of indium tin oxide （ITO） films were investigated by electrochemical methods in sodium hydroxide solutions. A cyclic voltammetric study of ITO films using both anodic and cathodic polarization was undertaken. Transmittance spectra, sheet resistance, scanning electron microscopy （SEM）, energy dispersive X-ray fluorescence spectrometry （EDS） and X-ray diffraction （XRD） analysis were used to characterize the severity of corrosion, the corrosion morphology and to identify the corrosion product. The ITO films remained stable after anodic polarization （approximately 1.5 V vs saturated calomel electrode （SCE））. In contrast, serious corrosion occurred during cathodic polarization （approximately -1.5 V （vs SCE））. Optical transmittance decreased greatly and sheet resistance increased by an order of magnitude. Some In^3＋ ions in the ITO electrode are reduced to metallic In attached to the surface.