中文摘要：

立方氮化硼（Cubic Boron Nitride，cBN）是仅次于金刚石的超硬材料，比金刚石具有更高的化学稳定性，可以胜任铁系金属的加工。本文在YG6硬质合金上基于微纳米金刚石过渡层开展cBN涂层的制备研究。本文在热丝化学气相沉积系统中制备微纳米金刚石过渡层（Micro／nanocrystalline diamond，M／NCD），在射频磁控溅射系统中制备cBN涂层，并对M／NCD与cBN涂层进行了成分、微观形貌与结合性能的研究。研究结果发现，在硬质合金基体上，M／NCD过渡层的结合性能明显优于NCD过渡层。磁控溅射制备cBN涂层过程中，存在适合cBN沉积的衬底偏压阈值，过高或过低的衬底偏压均不利于cBN含量的提高。

英文摘要：

Cubic Boron Nitride（cBN） is a super-hard material, of which hardness is only less than dia- mond. But it has excellent chemical stability, especially no chemical reaction with ferrous materials. The cBN coating has irreplaceable function in the application of modern cutting tools. Research is carried out on the preparation of cBN coating on YG6 by micro/nanocrystalline diamond （M/NCD） film interlayer. The micro/nanocrystalline diamond film is deposited in hot filament chemical vapor deposition system and cBN is deposited in radio frequency magnetron sputtering system. The scanning electron microscopy（SEM）, Raman, atomic force microscopy（AFM）, Fourier transferred infrared（FTIR） and indenter are used to investigate the content, morphology and adhesion of the coating. The results show that the adhesion of cBN coating on WC-Co by micro/nanocrystalline diamond interlayer is much higher than that by nano diamond interlayer. The moderate bias voltage is important for the cBN film deposi- tion in the magnetron sputtering process.