随着光电技术的发展,各种光学半透明薄膜在实际中得到了广泛应用。光学薄膜的使用必须建立在光学特性(如透射率、反射率和吸收率)已知的基础之上。一般而言,对于半透薄膜透射率的测量比较简单,而对于反射率和吸收率的测量往往比较复杂。本文在总结前人研究薄膜光学特性测量经验的基础之上,通过分析光路在多层薄膜间的传递过程,设计了一种利用辐射计有效测量半透薄膜光学特性的方法,测量简便、快速,可直接得到测量波段内薄膜的半球光学特性参数。在待测薄膜光学特性比较极端(透射率、反射率和吸收率其中之一很大或者很小)时,该方法仍然能够进行测量,并且透射率和反射率测量可重复性好,相对偏差一般不超过6%。
With the development of photoelectricity technology, different kinds of optical films have come into widely use. The using of optical film is based on the measurement of optical property (transmissivity, reflectivity and absorptivity). It's easy to measure the transmissivity, while difficult to get the reflectivity and absorptivity. By tracing the transfer of one beam of light among multilayer films, an easy and fast but efficiency method was developed to measure the optical property of translucent film by radiometer based on the former investigation of film measurement. When the film property is in extreme state (one of the transmissivity, reflectivity and absorptivity is very large or small), this method still can still be used and the error is usually no more than 6%.