设计研制了大气开放式金属有机化合物气相沉积(AP—MOCVD)装置,该装置操作简便,制备条件易控制,可制备不同碳掺杂氧化钛和纯氧化钛薄膜。以XRD、AES、XPS和uV—vis对碳掺杂氧化钛薄膜表征表明,以大气开放式MOCVD法在玻璃基片上制备的碳掺杂氧化钛薄膜,碳均匀掺杂到氧化钛晶格中,氧化钛晶格中碳占据了氧的位置并形成Ti—C键。其紫外可见吸收光谱(UV—vis)吸收曲线相对于纯氧化钛薄膜明显红移,并提高可见光的利用率。以AP—MOCVD法制备的碳掺杂氧化钛薄膜具有显著的可见光催化活性,在可见光下能使空气中的甲醛明显的光催化降解。
Carbon doped TiO2 and pure TiO2 thin films were prepared by air-opened metal organic chemical vapor deposition (MOCVD) method. Both pure TiO2 and carbon doped TiO2 films are in anatase structure. X-ray photoelectron spectra (XPS) of the carbon doped TiO2 film indicate carbon atoms occupy oxygen sites and form Ti- C bonds in TiO2 lattice. In UV-vis absorption spectra,it car/be found that the carbon doped TiO2 film has a redshifted absorption edge compared with the pure TiO2 film. In the photo catalytic decomposition experiment of formaldehyde,carbon doped TiO2 exhibited remarkably visible light activity.