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Particles detection and analysis of hard disk substrate after cleaning of post chemical mechanical p
  • ISSN号：0169-4332
  • 期刊名称：Applied Surface Science
  • 时间：0
  • 页码：9100-9104
  • 语言：英文
  • 相关项目：化学机械组合作用功能粒子及其超精抛光机理研究
作者： Pan, Guoshun|Lu, Xinchun|Lee, Bill|Huang, Yating|Luo, Jianbin|
同期刊论文项目
化学机械组合作用功能粒子及其超精抛光机理研究
期刊论文 17 会议论文 9 获奖 2 专利 11
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