Horizontal InAs nanowire transistors grown on patterned silicon-on-insulator substrate
ISSN号:1674-1056
期刊名称:《中国物理B:英文版》
时间:0
分类:TN311.7[电子电信—物理电子学] O484[理学—固体物理;理学—物理]
作者机构:[1]Engineering Research Center for Semiconductor Integrated Technology, Beijing Engineering Center of Semiconductor Micro-Nano Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China, [2]School of Electronic, Electrical, and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China, [3]State Key Laboratory for Supedattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China, [4]Key Laboratory of Semiconductor Materials Science, Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
相关基金:the National Key Research and Development Program of China (Grant No. 2016YFA02005003) and the National Natural Science Foundation of China (Grant Nos. 61376096 and 61327813).