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Batch-fabricated cantilever probes with electrical shielding for nanoscale dielectric and conductivi
  • ISSN号：0960-1317
  • 期刊名称：Journal of Micromechanics and Microengineering
  • 时间：2012
  • 页码：-
  • 相关项目：微纳系统材料、制造与器件物理
作者： Yang, Yongliang1, 2|Lai, Keji2|Tang, Qiaochu1|Kundhikanjana, Worasom2|Kelly, Michael A2|Zhang, Kun1|Shen, Zhi-Xun2|Li, Xinxin1|
同期刊论文项目
微纳系统材料、制造与器件物理
期刊论文 80 会议论文 27 专利 30
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