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微纳系统材料、制造与器件物理
  • 项目名称：微纳系统材料、制造与器件物理
  • 项目类别：创新研究群体科学基金
  • 批准号：61021064
  • 申请代码：F040401
  • 项目来源：国家自然科学基金
  • 研究期限：2011-01-01-2013-12-31
  • 项目负责人：封松林
  • 负责人职称：研究员
  • 依托单位：中国科学院上海微系统与信息技术研究所
  • 批准年度：2010
中文摘要：

中文主题词微纳传感器；谱分析；环境气体；纳米材料；纳米效应

中文主题词：
英文摘要：

Micro-Nano Sensor；Spectral Analysis；Enviromental Gases；Nano Material；Nano Effect

英文主题词： Micro-Nano Sensor；Spectral Analysis；Enviromental Gases；Nano Material；Nano Effect
成果综合统计
成果类型
数量
  • 期刊论文
  • 会议论文
  • 专利
  • 获奖
  • 著作
  • 80
  • 27
  • 30
  • 0
  • 0
期刊论文
太赫兹量子阱探测器的暗电流抑制电路研究
Top-Down Fabricated Silicon-Nanowire-Based Field-Effect Transistor Device on a (111) Silicon Wafer
Development of a Reliable Micro-Hotplate With Low Power Consumption
Determination of the Lattice Parameters of a Si Nanobelt in a Tensile Test Process Using an MEMS Act
Energy-loss rate of a fast particle in two-dimensional semiconductors with Rashba spin-orbit couplin
Ultrafast population dynamics in electrically modulated terahertz quantum cascade lasers
Effect of injection coupling strength on terahertz quantum-cascade lasers
Dephasing Effect on the Carrier-light Interaction in Terahertz Quantum Cascade Lasers
高质量大面积石墨烯的化学气相沉积制备方法研究
An Ultra Low Power Consumption Methane Gas Detector Based on an Optimized Suspended Membrane Microho
基于静电力的微液滴驱动芯片
Thermocapillary Actuation of Droplets on a Microfluidic Chip
太赫兹量子级联激光器及其光束表征技术
Negative differential resistance induced by thermalization of two-dimensional electrons in terahertz
Alternating current Josephson effect in superconductor-graphene-superconductor junctions
Wireless communication demonstration at 4.1 THz using quantum cascade laser and quantum well photode
Study on small-signal impedance of single-walled zigzag carbon nanotubes in terahertz frequency regi
Electron tunneling in single layer graphene with an energy gap
太赫兹量子阱光电探测器光栅耦合的模拟与优化
Terahertz computed tomorgraphy with a quantum cascade laser and a quantum-well photodetector
High performance external cavity InAs/InP quantum dot lasers
High Intensity Single-Mode Peak Observed in the Lasing Spectrum of InAs/GaAs Quantum Dot Laser
Growth of metamorphic InGaP layers on GaAs substrates
Digital Microfluidic Chip for Rapid Portable Detection of Mercury(II)
Near field and cavity effects on coupling efficiency of one-dimensional metal grating for terahertz
The graphene-SiC substrate interaction enhanced near-infrared absorption
Study of resonant-phonon terahertz quantum-cascade lasers
低温InGaAs/InAlAs多量子阱的分子束外延生长与表征,强激光与粒子束
Emitter injection in terahertz quantum cascade lasers: Simulation of an open system
Numerical Study on Metal Cavity Couplers for Terahertz Quantum-Well Photodetectors
Temperature dependence of electron transport on a bound-to-continuum terahertz quantum cascade laser
Asymmetric Fabry-Perot Oscillations in Metal Grating-Coupled Terahertz Quantum Well Photodetectors
Terahertz generation by quantum-dot miniband superlattices in the absence of electric field domains
Dwell time in one-dimensional graphene asymmetrical barrier
THz Imaging Using a Quantum-Well Photodetector with Background Limited Performance
Terahertz Imaging With Quantum-Well Photodetectors
Polaron effects on the dc- and ac-tunneling characteristics of molecular Josephson junctions
Dynamical band-engineering of spin-polarized edge-states in normal insulators
Coupling Efficiency of Lamellar Gratings for Terahertz Quantum-well Photodetectors
Terahertz Frequency Response of Electrons in a Single-walled Zigzag Carbon Nanotube
Tunneling transport through superconducting wires with Majorana bound states
Research progress in terahertz quantum cascade lasers
Axial-Stressed Piezoresistive Nanobeam for Ultrahigh Chemomechanical Sensitivity to Molecular Adsorp
Hyper-branched sensing polymer directly constructed on a resonant micro-cantilever for the detection
Temperature dependent lasing characteristics of InAs/InP(100) quantum dot laser
Optical investigation of InAs/InP(100) quantum dots grown by gas source molecular beam epitaxy
Measurements of I-V characteristics in InAs/InP quantum dot laser diode
Ultra-sensitive nucleic acids detection with electrical nanosensors based on CMOS-compatible silicon
In situ SEM electromechanical characterization of nanowire using an electrostatic tensile device
Recent Progress in Terahertz Quantum-Well Photodetectors
Spontaneous emission from a medium with elliptic and hyperbolic dispersion
基于ZigBee远程控制的激光光源系统
Chemo-Mechanical Joint Detection with Both Dynamic and Static Microcantilevers for Interhomologue Mo
Batch-fabricated cantilever probes with electrical shielding for nanoscale dielectric and conductivi
Metal-Grating-Coupled Terahertz Quantum-Well Photodetectors
基于太赫兹量子级联激光器的无线信号传输的实现
Channel characterization at 120 GHz for future indoor communication systems
Computed tomography using THz quantum cascade laser and quantum well photo-detector
Weak localization in few-layer graphene grown on copper foils by chemical vapor deposition
Surface plasmon-enhanced absorption in metal grating coupled terahertz quantum well photodetectors
Enhanced Sensing of Nucleic Acids with Silicon Nanowire Field Effect Transistor Biosensors
Optimization of radiative recombination in terahertz quantum cascade lasers for high temperature ope
CMOS MEMS-based thermoelectric generator with an efficient heat dissipation path
Nano Fabrication Effects and sensors based on MEMS technology
Fast-Response, Sensitivitive and Low-Powered Chemosensors by Fusing Nanostructured Porous Thin Film
微纳系统材料、制造与器件物理研究进展
2．9THz束缚态向连续态跃迁量子级联激光器研制
太赫兹通信技术研究进展
Wafer-level site-controlled growth of silicon nanowires by Cu pattern dewetting
会议论文
Resonant micro-cantilever chemical sensor with one-step synthesis of -COOH functionalized mesoporous
Different responses between undoped and N-doped few-layer graphene based photonic devices
A high-q bulk-resonator equipped with ultra-sensitive mesoporous nano-material for detection of trac
Permeable-membrane separating detection of vaporized liquid with nanoparticle-functionalized resonan
Tensile strained Ge thin films grown on InGaP/GaAs metamorphic templates,
Magnetoresistance behaviors of undeped and N-doped graphene grown by CVD method
Label-free DNA detection based on silicon nanowires
CMOS-compatible silicon nanowire based field-effect pH sensor
InAs quantum dot lasers grown by gas source molecular beam epitaxy on Ge substrates
Optimization design and fabrication of a novel optical-readout uncooled thermal imaging chip
A Low Power Catalytic Combustion Gas Sensor Based on a Suspended Membrane Microhotplate,
Study of droplets motion on a chip driven by thermal gradient
Photovoltaic and photoconductive effects in different individual single-walled carbon-nanotube-based
Thin-film-based thermoelectric energy generator device with a card structure
Photovoltaic response of N-doped graphene-based photodetector
Precise width control of single crystalline silicon nano-wall structure based on wet etching process
A high heating efficiency two-beam microhotplate for catalytic gas sensors
Micromachining of Single Crystalline Silicon Nanowires on (111) Silicon Wafers
Design and Fabrication of a Novel 3D Micropellistor
INTEGRATION OF MICROFLUIDIC SAMPLE DELIVERY SYSTEM ON SILICON NANOWIRE-BASED BIOSENSOR
LABEL-FREE ELECTRICAL DETECTION OF DNA WITH CMOS-COMPATIBLE SILICON NANOWIRE BIOSENSOR ARRAYS,
The Few-layer Graphene’s Electrical Response to CH4 on Microheater,
Nano fabrication for nano effect and nano sensor,
InAs/InP量子点激光器的研究
Functionalized gold-nanoparticles directly grown on graphene-oxide sheets to form porous-stacked sen
Resonant cantilevers with nanoparticles-spaced functional graphene-oxide sheets for high-performance
Optimization on the synthesis of large-area single-crystal graphene domains by chemical vapor deposi
专利
半导体衬底的表面处理方法
制备带有绝缘埋层的半导体衬底的方法以及半导体衬底
基于石墨烯纳米带的太赫兹波产生器件
一种太赫兹波段的无线发射接收装置及其发射接收方法
具有弧度可调的圆弧形加热膜区的三维微型加热器及方法
一种具有网孔结构加热膜的低功耗微型加热器及制作方法
制备具有均匀厚度器件层的衬底的方法
一种制备石墨烯的方法
一种增加变形梁强度和使用寿命的结构及其应用
一维光栅太赫兹量子阱光电探测器响应率的优化方法
采用选择性腐蚀制备带有绝缘埋层的衬底的制备方法
用于太赫兹量子阱探测器的一维金属光栅及其设计方法
发散性太赫兹光源光学光路的对焦系统和方法
一种晶向旋转键合晶片的制备方法
一种基于SOI衬底的高迁移率双沟道材料的制备方法
一种基于键合工艺的高迁移率双沟道材料的制备方法
一种高K介质埋层的绝缘体上材料制备方法
一种基于键合工艺的高K介质埋层的SOI材料制备方法
具有非均匀线宽加热电阻丝的矩形微型加热器及方法
具有非均匀线间距加热电阻丝的矩形微型加热器及方法
一种具有两支撑悬梁六层结构的电阻式气体传感器及方法
一种制备单晶硅纳米结构的方法
一种利用稀磁半导体测量多量子阱耦合的方法
基于太赫兹量子阱探测器的被动式热成像探测
一种具有四支撑悬梁四层结构的电阻式气体传感器及方法
一种具有两支撑悬梁四层结构的电阻式气体传感器及方法
一种平面型半导体热电芯片及制备方法
一种在（110）型硅片表面自上而下制备纳米结构的方法
一种在（111）型硅片表面制备纳米结构的方法
一种在（100）型SOI硅片表面自上而下制备纳米结构的方法
封松林的项目
太赫兹半导体振荡器和探测器物理与设计
期刊论文 76 会议论文 26
微纳系统材料、制造与器件物理
期刊论文 21 专利 22
第二届超快现象与太拉赫兹波国际学术研讨会