利用压电陶瓷材料的精密位移输出特性和金属橡胶材料的多孔、减压、节流特性设计出了一种超高压精密流量控制阀,来实现超高压、微小流量的精确控制,并得到了该阀的流量表达式。理论分析结果表明,该阀的流量不仅与阀进出口的压差有关,还与压电陶瓷和金属橡胶的参数有关。
A extrahighpressure metalrubber precision flow valve was designed. It uses precision displacement output charac teristics of the piezoelectric ceramic and porosity, decompression, throttling characteristics of metal rubber to achieve the high pressure and precise control of the flow valve. The flow equation of the flow value is derived. The theoretical analysis shows that the flow of the valve is not only related to differential pressure between the import and export of valve, but the parameters of the piezoelectric ceramic and metal rubber.