中文摘要：

以（MeCp）Pt（CH3）3和02为反应源，采用原子层淀积（ALD）技术在A1203衬底上制备Pt纳米颗粒，研究了在氮气中快速热退火对Pt纳米颗粒的特性的影响。结果表明，随着退火温度从700℃升高到900℃，Pt纳米颗粒尺寸逐渐增大，颗粒之间分离愈加清晰，形貌趋向球形，但颗粒密度稍有降低。随着在800℃退火时间从15s增加到60s，Pt纳米颗粒的尺寸逐渐增大，尺寸分布变得更加弥散，颗粒的密度逐渐降低；其中退火15s后的Pt纳米颗粒密度高（9．29x10ucm-2）、分布均匀、分离清晰。900℃退火后在Pt纳米颗粒中出现部分氧化态的Pt原子，其原因可能是在高温下Pt纳米颗粒与A1203薄膜之间发生了界面化学反应。

英文摘要：

Pt nanoparticles were prepared on AI203 films by atomic layer deposition using （MeCp）Pt（CH3）3 and 02 as precursors, and the effect of rapid thermal annealing （RTA） on the char- acteristics of Pt nanoparticles was investigated. The results show that as the annealing temperature rises from 700 to 900 ℃, Pt nanoparticles exhibit the increase of the dimensions and self-separation, a tendency to spherical growth, and a slight decrease in particle density. With increasing the annealing time from 15 s to 60 s at 800 ℃, Pt nanoparticles grow big gradually together with increscent dimension dispersion and a decreasing density. Therefore, it is concluded that the annealing at 800℃ for 15 s can achieve high density （9.29×1011cm^-2）, uniform and well-separated Pt nanoparticles. Moreover, when the annealing temperature is increased to 900 ℃, some Pt atoms are oxidized, which is likely due to the interracial reaction between Pt and AI2O3